JPS631325U - - Google Patents
Info
- Publication number
- JPS631325U JPS631325U JP9405186U JP9405186U JPS631325U JP S631325 U JPS631325 U JP S631325U JP 9405186 U JP9405186 U JP 9405186U JP 9405186 U JP9405186 U JP 9405186U JP S631325 U JPS631325 U JP S631325U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing apparatus
- wafer processing
- heat treatment
- cooling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 150000002894 organic compounds Chemical class 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9405186U JPS631325U (en]) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9405186U JPS631325U (en]) | 1986-06-20 | 1986-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS631325U true JPS631325U (en]) | 1988-01-07 |
Family
ID=30957143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9405186U Pending JPS631325U (en]) | 1986-06-20 | 1986-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631325U (en]) |
-
1986
- 1986-06-20 JP JP9405186U patent/JPS631325U/ja active Pending